Semiconductor devices including diffusion break regions

ABSTRACT

Semiconductor devices and methods of forming the same are provided. Semiconductor devices may include a substrate including first and second regions, first active fins extending in a first direction on the first region, second active fins extending parallel to the first active fins on the second region, and single diffusion break regions between two first active fins. Single diffusion break regions may be spaced apart from each other in the first direction. The semiconductor devices may also include a lower diffusion break region between two second active fins and extending in a second direction that is different from the first direction and upper diffusion break regions on the lower diffusion break region. The upper diffusion break regions may be spaced apart from each other in the first direction, and each of the upper diffusion break regions may overlap the lower diffusion break region.

CROSS-REFERENCE TO RELATED APPLICATION

This U.S. non-provisional patent application claims priority under 35U.S.C. § 119 to Korean Patent Application No. 10-2018-0095110, filed onAug. 14, 2018, the disclosure of which is incorporated herein byreference in its entirety.

BACKGROUND

The present disclosure generally relates to the field of electronicsand, more particularly, to a semiconductor device.

With an increase in the integration density of semiconductor devices, itis becoming increasingly difficult to meet transistor performancerequired by users. To improve transistor performance, various materialsand/or structures for field-effect transistor (FET) have been proposed.For example, a high-k dielectric-metal gate structure has been proposedto replace a conventional FET including a silicon oxide gate insulatinglayer and a polycrystalline silicon gate electrode.

SUMMARY

Example embodiments of the inventive concept are directed to providing asemiconductor device having improved performance.

In addition, example embodiments of the inventive concept are directedto providing a semiconductor device having reduced variations in devicecharacteristics.

According to example embodiments, semiconductor devices may include asubstrate including a first region and a second region, a plurality offirst active fins extending in a first direction on the first region, aplurality of second active fins extending parallel to the plurality offirst active fins on the second region, and a plurality of singlediffusion break regions between two first active fins of the pluralityof first active fins. The plurality of single diffusion break regionsmay be spaced apart from each other in the first direction. Thesemiconductor devices may also include a lower diffusion break regionbetween two second active fins of the plurality of second active finsand extending in a second direction that is different from the firstdirection and a plurality of upper diffusion break regions on the lowerdiffusion break region. The plurality of upper diffusion break regionsmay be spaced apart from each other in the first direction, and each ofthe plurality of upper diffusion break regions may overlap the lowerdiffusion break region.

According to example embodiments, semiconductor devices may include asubstrate including a first region and a second region and a pluralityof first active fins extending in a first direction on the first region.Two first active fins of the plurality of first active fins may define afirst fin recess in the first region of the substrate. The semiconductordevices may also include a plurality of second active fins extendingparallel to the plurality of first active fins on the second region ofthe substrate and a first gate structure and a second gate structure.Each of the first and second gate structures may traverse one of theplurality of first active fins and one of the plurality of second activefins and having a first width in the first direction. The semiconductordevices may further include first and second outer spacers between thefirst and second gate structures. The first and second outer spacers maybe spaced apart from each other by a first distance in the firstdirection, the first distance may be at least twice the first width, thefirst and second outer spacers may define a first gate trenchtherebetween, and the first gate trench may be connected to the firstfin recess. Additionally, the semiconductor devices may include a doublediffusion break region in the first fin recess and the first gatetrench, a lower diffusion break region in the second region of thesubstrate between two second active fins of the plurality of secondactive fins, and first and second inside spacers on the lower diffusionbreak region between the first and second outer spacers. The first outerspacer, the first inner spacer, the second inner spacer, and the secondouter spacer may be sequentially arranged along the first direction, andtwo second gate trenches may be defined by a pair of the first outerspacer and the first inner spacer and a pair of the second inner spacerand the second outer spacer. The semiconductor devices may furtherinclude two upper diffusion break regions in the two second gatetrenches, respectively.

According to example embodiments, semiconductor devices may include asubstrate including a P-type metal-oxide-semiconductor (PMOS) region andan N-type MOS (NMOS) region, a plurality of first active fins extendingin a first direction on the PMOS region, a plurality of second activefins extending parallel to the plurality of first active fins on theNMOS region, and a first gate structure and a second gate structureextending in a second direction and being spaced apart from each otherin the first direction. Each of the first and second gate structures maytraverse one of the plurality of first active fins and one of theplurality of second active fins. The semiconductor devices may alsoinclude a lower diffusion break region in the NMOS region of thesubstrate between two second active fins of plurality of the secondactive fins and between the first gate structure and the second gatestructure and an upper diffusion break region on the lower diffusionbreak region.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1. schematically illustrates a layout of a partial region of asemiconductor device according to some embodiments of the inventiveconcept.

FIG. 2A shows vertical cross-sectional views taken along lines I-I′ andII-IF of FIG. 1 according to some embodiments of the inventive concept.

FIG. 2B shows vertical cross-sectional views taken along lines IV-IV′,and V-V′ of FIG. 1 according to some embodiments of the inventiveconcept.

FIG. 2C shows vertical cross-sectional views taken along the lines I-I′and II-IF of FIG. 1 according to some embodiments of the inventiveconcept.

FIG. 3 schematically illustrates a layout of a partial region of asemiconductor device according to some embodiments of the inventiveconcept.

FIG. 4A shows vertical cross-sectional views taken along lines VI-VI′and VII-VII′ of FIG. 3 according to some embodiments of the inventiveconcept.

FIG. 4B shows vertical cross-sectional views taken along linesVIII-VIII′, IX-IX′, and X-X′ of FIG. 3 according to some embodiments ofthe inventive concept.

FIGS. 4C and 4D show vertical cross-sectional views taken along linesVI-VI′ and VII-VII′ of FIG. 3 according to some embodiments of theinventive concept.

FIGS. 5A, 5B, 6A, 6B, 7A, 7B, 8A, 8B, 9A, 9B, 10A, and 10B are verticalcross-sectional views illustrating a method of manufacturing asemiconductor device according to some embodiments of the inventiveconcept.

FIGS. 11 through 15 are vertical cross-sectional views illustrating amethod of manufacturing a semiconductor device according to someembodiments of the inventive concept.

DETAILED DESCRIPTION

Hereinafter, semiconductor devices and methods of manufacturing the sameaccording to embodiments of the inventive concept will be described withreference to the accompanying drawings. Like reference numbers refer tolike elements throughout.

FIG. 1 schematically illustrates a layout of a partial region of asemiconductor device according to some embodiments of the inventiveconcept. FIG. 2A shows vertical cross-sectional views taken along linesI-I′ and II-IF of FIG. 1. FIG. 2B shows vertical cross-sectional viewstaken along lines IV-IV′, and V-V′ of FIG. 1.

Referring to FIGS. 1 to 2B, the semiconductor device 100 according tothe embodiment of the inventive concept may include a substrate 101,active regions AR1 and AR2, active fins F1 and F2, a device isolationlayer STI and DTI, gate structures G1, G2, G3, and G4, source and drainregions 120, an interlayer insulating layer 130, a mask layer 140, dummyspacers 161 and 162, gate trenches GT1 and GT2, fin recesses FR1 andFR2, a single diffusion break region SDB, a lower diffusion break regionDB1, and an upper diffusion break region DB2.

The substrate 101 may include a first region P and a second region N.For example, the first region P may be a P-typemetal-oxide-semiconductor (PMOS) region, and the second region N may bean N-type MOS (NMOS) region. The substrate 101 may include asemiconductor material, such as silicon (Si) and germanium (Ge). Forexample, the substrate 101 may be formed of at least one materialselected out of silicon (Si), germanium (Ge), silicon germanium (SiGe),gallium phosphide (GaP), gallium arsenide (GaAs), silicon carbide (SiC),silicon germanium carbide (SiGeC), indium arsenide (InAs), and indiumphosphide (InP). However, the substrate 101 according to the inventiveconcept is not limited to the above-described examples. In someembodiments, the substrate 101 may be a silicon on insulator (SOI)substrate.

The active regions AR1 and AR2 may include a first active region AR1 anda second active region AR2. The first active region AR1 may be disposedin the first region P, and the second active region AR2 may be disposedin the second region N. The active regions AR1 and AR2 may elongate in afirst direction. In some embodiments, the active regions AR1 and AR2 mayextend longitudinally in the first direction. The active regions AR1 andAR2 may be spaced apart from each other in a second directionintersecting the first direction. The active regions AR1 and AR2 mayprotrude in a third direction, which is vertical to the main surface ofthe substrate 101. In some embodiments, the third direction may beperpendicular to both the first direction and the second direction.

The active fins F1 and F2 may include a first active fin F1 disposed inthe first region P and a second active fin F2 disposed in the secondregion N. The first active fin F1 may be disposed on the first activeregion AR1, and the second active fin F2 may be disposed on the secondactive region AR2. The active fins F1 and F2 may be disposed apart fromeach other on the active regions AR1 and AR2 in the first direction andthe second direction. The active fins F1 and F2 may protrude in thethird direction in the active regions AR1 and AR2. The active fins F1and F2 may elongate in the first direction. In some embodiments, each ofthe active fins F1 and F2 may extend longitudinally in the firstdirection as illustrated in FIG. 1. Each of the active fins F1 and F2may include a long side extending in the first direction and a shortside extending in the second direction.

The active regions AR1 and AR2 and the active fins F1 and F2 may beportions of the substrate 101 and may include epitaxial layers grownfrom the substrate 101. In some embodiments, the active regions AR1 andAR2 and the active fins F1 and F2 may include a semiconductor material.For example, the active regions AR1 and AR2 and the active fins F1 andF2 may include silicon (Si), silicon germanium (SiGe), or the like. Insome embodiments, the active regions AR1 and AR2 and the active fins F1and F2 may include the same material as the substrate 101. For example,when the substrate 101 includes silicon, the active regions AR1 and AR2and the active fins F1 and F2 may also include silicon. However, theinventive concept is not limited thereto, and the substrate 101 mayinclude a different material from the active regions AR1 and AR2 and theactive fins F1 and F2.

The device isolation layer STI and DTI may include a shallow deviceisolation layer STI and a deep device isolation layer DTI. The deviceisolation layer STI and DTI may define the active regions AR1 and AR2and the active fins F1 and F2. In some embodiments, the device isolationlayer STI and DTI may cover sidewalls of the active regions AR1 and AR2on the substrate 101 as illustrated in FIG. 2B. The device isolationlayer STI and DTI may cover only lower sidewalls of the active fins F1and F2 but may not cover upper sidewalls thereof. The shallow deviceisolation layer STI may be disposed in the first region P and the secondregion N. The deep device isolation layer DTI may be disposed betweenthe first region P and the second region N. A bottom surface of the deepdevice isolation layer DTI may be at a lower level than a bottom surfaceof the shallow device isolation layer STI. For example, the deviceisolation layer STI and DTI may include any one of oxide, oxynitride,and nitride. It will be understood that “an element A covers a surfaceof an element B” (or similar language) means that the element A is onthe surface of the element B but does not necessarily mean that theelement A covers the surface of the element B entirely.

The gate structures G1, G2, G3, and G4 may include first, second, thirdand fourth gate structures. The gate structures G1, G2, G3, and G4 mayextend in the second direction on the active fins F1 and F2. The gatestructures G1, G2, G3, and G4 may be spaced apart from each other in thefirst direction. The gate structures G1, G2, G3, and G4 may be disposedon the active fins F1 and F2 and the device isolation layer STI.

Each of the gate structures G1, G2, G3, and G4 may include a gateelectrode 111 and 112, a gate insulating layer 113, gate spacers 114,and a gate capping layer 115. The gate electrode 111 and 112 may includeat least two layers that are stacked. In some embodiments, the gateelectrode 111 and 112 may include a first gate metal layer 111 and asecond gate metal layer 112. The first gate metal layer 111 may controlor regulate a work function, and the second gate metal layer 112 mayfill a space formed by the first gate metal layer 111. Further, thefirst gate metal layer 111 may include, for example, at least one oftitanium nitride (TiN), tungsten nitride (WN), titanium aluminide(TiAl), titanium aluminum nitride (TiAlN), tantalum nitride (TaN),titanium carbide (TiC), tantalum carbide (TaC), tantalum carbonitride(TaCN), tantalum silicon nitride (TaSiN), and a combination thereof. Inaddition, the second gate metal layer 112 may include, for example, atleast one of tungsten (W), aluminum (Al), cobalt (Co), titanium (Ti),tantalum (Ta), polysilicon (poly-Si), silicon germanium (SiGe), and ametal alloy. It will be understood that “an element A fills an elementB” (or similar language) means that the element A is in the element Bbut does not necessarily mean that the element A completely fills theelement B.

The gate insulating layer 113 may be disposed between the gate electrode111 and 112 and the active fins F1 and F2. Further, the gate insulatinglayer 113 may be disposed between the gate electrode 111 and 112 and thedevice isolation layers DTI and STI. The gate insulating layer 113 mayextend in the second direction along profiles of the active fins F1 andF2 protruding upward from the device isolation layers DTI and STI. Thegate insulating layer 113 may be formed in a shape extending in thethird direction along a side surface of the gate electrode 111 and 112.For example, the gate electrode 111 and 112 and the gate insulatinglayer 113 may be formed using a replacement process (e.g., a gate lastprocess). The gate insulating layer 113 may include, for example, ahigh-k dielectric material having a higher dielectric constant than thatof a silicon oxide film. For example, the gate insulating layer 113 mayinclude hafnium oxide (HfO₂), zirconium oxide (ZrO₂), lanthanum oxide(LaO), aluminum oxide (Al₂O₃), tantalum oxide (Ta₂O₅), or the like.

The gate spacers 114 may be disposed on both sides of the gate electrode111 and 112 and the gate insulating layer 113, which may extend in thesecond direction. The gate spacers 114 may be in contact with both sidesurfaces of the gate insulating layer 113. The gate spacers 114 mayinclude, for example, a nitride film. For example, the gate spacers 114may include at least one of silicon nitride, silicon oxynitride, siliconoxide, silicon oxycarbonitride and a combination thereof.

The gate capping layer 115 may be disposed on the gate electrode 111 and112 and the gate insulating layer 113. The gate capping layer 115 mayextend in the second direction between the gate spacers 114. A topsurface of the gate capping layer 115 may be substantially coplanar withtop surfaces of the gate spacers 114. In other words, the top surface ofthe gate capping layer 115 may be at substantially the same level as thetop surfaces of the gate spacers 114. For example, the gate cappinglayer 115 may include at least one of a silicon nitride film and asilicon oxynitride film. In some embodiments, the gate capping layer 115may be omitted.

The source and drain regions 120 may be disposed on both sides of thegate structures G1, G2, G3, and G4. The source and drain regions 120 maybe disposed in the active fins F1 and F2. That is, the source and drainregions 120 may be in regions of the active fins F1 and F2, which areformed by partially etching the active fins F1 and F2. Although FIG. 2Billustrates a case in which two adjacent source and drain regions 120are in contact with each other in the second direction, the inventiveconcept is not limited thereto, and, in some embodiments, the twoadjacent source and drain regions 120 may be spaced apart from eachother in the second direction. In some embodiments, the source and drainregions 120 may be elevated source and drain regions. Thus, upper endsof the source and drain regions 120 may be at a higher level than upperends of the active fins F1 and F2.

In some embodiments, when a transistor including the source and drainregions 120 is a PMOS transistor, the source and drain regions 120 mayinclude a compressive stress material. For example, the compressivestress material may be a material (e.g., SiGe) having a higher latticeconstant than silicon. The compressive stress material may applycompressive stress to the active fins F1 and F2 (i.e., channel regions)under the gate structures G1, G2, G3, and G4 and improve the mobility ofcarriers in the channel regions. In some embodiments, when a transistorincluding the source and drain regions 120 is an NMOS transistor, thesource and drain region 120 may include the same material as thesubstrate 101 or a tensile stress material. For instance, when thesubstrate 101 includes silicon, the source and drain regions 120 mayinclude silicon or a material (e.g., silicon carbide (SiC) and siliconphosphide (SiP)) having a lower lattice constant than silicon. Thetensile stress material may apply tensile stress to the active fins F1and F2 (i.e., the channel regions) under the gate structures G1, G2, G3,and G4 and improve the mobility of carries in the channel regions.

In some embodiments, the source and drain regions 120 may be formedusing an epitaxial growth process. Although not shown, a silicon filmmay be formed on the source and drain regions 120. The silicide film maybe formed along top surfaces of the source and drain regions 120. Thesilicide film may reduce a sheet resistance or a contact resistance whenthe source and drain regions 120 are in contact with contacts. Thesilicide film may include a conductive material, for example, platinum(Pt), nickel (Ni), cobalt (Co), or the like. The contacts may be formedon the silicide film. The contacts may be formed of a conductivematerial. The contact may include, for example, tungsten (W), aluminum(Al), copper (Cu), or the like.

The interlayer insulating layer 130 may be disposed on the source anddrain regions 120 and the device isolation layer STI and DTI. Further,the interlayer insulating layer 130 may be formed to be in contact withouter sidewalls of the gate spacers 114. The interlayer insulating layer130 may include, for example, at least one of silicon oxide, siliconnitride, silicon oxynitride, and a low-k dielectric material.

The mask layer 140 may be disposed on the gate structures G1, G2, G3,and G4 and the interlayer insulating layer 130. The mask layer 140 maycover top surfaces of the gate structures G1, G2, G3, and G4 and the topsurfaces of the interlayer insulating layers 130. As an example, themask layer 140 may include oxide.

The dummy spacers 161 and 162 may be a pair of spacers having inner sidesurfaces facing each other. For example, the dummy spacers 161 and 162may include outer spacers 161 and inner spacers 162. The outer spacers161 may be disposed closer to the gate structures G1, G2, G3, and G4than the inner spacers 162. The dummy spacers 161 and 162 may bedisposed over the first region P and the second region N. The dummyspacers 161 and 162 may be disposed between the first gate structure G1and the second gate structure G2. In some embodiment, a plurality ofdummy spacers 161 and 162 may be spaced apart from each other in thefirst direction. For example, a distance between the plurality of dummyspacers 161 and 162 in the first direction may be equal to a distancebetween each of the dummy spacers 161 and 162 and a gate structure,which is most adjacent thereto, in the first direction. The dummyspacers 161 and 162 may elongate in the second direction on the firstactive fin F1, the device isolation layer STI and DTI, and the secondactive fin F2. Outer sidewalls of the dummy spacers 161 and 162 may bein contact with the source and drain regions 120 and the interlayerinsulating layer 130. In some embodiments, each of the dummy spacers 161and 162 may extend in the second direction as illustrated in FIG. 1.

The first gate trenches GT1 may be disposed in the first region P. Thefirst gate trenches GT1 may be disposed between the first gate structureG1 and the second gate structure G2. In some embodiments, a plurality offirst gate trenches GT1 may be spaced apart from each other in the firstdirection. For instance, two first gate trenches GT1 may be spaced apartfrom each other in the first direction. Sidewalls of the first gatetrench GT1 may be defined by portions of the dummy spacers 161 and 162,which are disposed in the first region P. A bottom surface of the firstgate trench GT1 may be defined by the device isolation layer STI andDTI. The first gate trench GT1 may elongate on the device isolationlayer STI and DTI along the dummy spacers 161 and 162 in the seconddirection.

First fin recesses FR1 may be disposed in the first region P. The firstfin recesses FR1 may be disposed between the first gate structure G1 andthe second gate structure G2. In some embodiments, a plurality of firstfin recesses FR1 may be spaced apart from each other in the firstdirection and the second direction. For example, the first fin recessesFR1 may be respectively spaced apart from the first active fins F1 inthe first direction, which are spaced apart from each other in thesecond direction. Sidewalls of the first fin recesses FR1 may be incontact with short sides of the first active fins F1. The sidewalls ofthe first fin recess FR1 may be defined by the first active fins F1. Insome embodiments, the sidewalls of the first fin recess FR1 may bedefined by the first active region AR1 and the first active fin F1. Thefirst fin recesses FR1 may expose the first active fins F1. The firstfin recess FR1 may be disposed under the first gate trench GT1. Thefirst fin recess FR1 may be overlapped by the first gate trench GT1 fromviewed from above. The first fin recess FR1 may be formed by extending aportion of the first gate trench GT1 downward. The first fin recess FR1may be integrally formed with the first gate trench GT1 to form anintegral trench space. In some embodiments, the first fin recess FR1 maybe connected to the first gate trench GT1, and the first fin recess FR1and the first gate trench GT1 may form a single space as illustrated inFIG. 2A.

A single diffusion break region SDB may be disposed inside the firstgate trench GT1 and the first fin recess FR1 in the first region P. Thesingle diffusion break region SDB may fill the first gate trench GT1 andthe first fin recess FR1. The single diffusion break region SDB may bein contact with the first active fin F1 and the first active region AR1,which are exposed by the first fin recess FR1. The single diffusionbreak region SDB may be in contact with the device isolation layer STIand DTI and the dummy spacers 161 and 162. The single diffusion breakregion SDB may be inside the first gate trench GT1 and may extend in thethird direction so that an upper portion of the single diffusion breakregion SDB may be interposed between the mask layers 140. In someembodiments, the single diffusion break region SDB may include acompressive stress material. The compressive stress material may be amaterial capable of applying compressive stress to a PMOS region. Forexample, the single diffusion break region SDB may include siliconnitride. As shown in FIG. 2A, a pair of single diffusion break regionsSDB, which may be formed by replacing two gate structures, may bereferred to as a “multiple diffusion break region.”

A second fin recess FR2 may be disposed in the second region N. Thesecond fin recess FR2 may be disposed between the first gate structureG1 and the second gate structure G2. Sidewalls of the second fin recessFR2 may be in contact with short sides of the second active fins F2. Thesidewalls of the second fin recess FR2 may be defined by the secondactive fin F2 and the device isolation layer STI and DTI. In someembodiments, the sidewalls of the second fin recess FR2 may be definedby the second active region AR2, the second active fin F2, and thedevice isolation layer STI and DTI. The second fin recess FR2 may exposethe second active fins F2. A width of the second fin recess FR2 in thefirst direction may be less than a distance between outer sidewalls ofthe outer spacers 161 of two adjacent dummy spacers 161 and 162.Further, the width of the second fin recess FR2 in the first directionmay be greater than a distance between outer sidewalls of the innerspacers 162 of two adjacent dummy spacers 161 and 162. As shown in FIG.2A, a lower end of the second fin recess FR2 may be at a different levelfrom a lower end of the first fin recess FR1. For example, the lower endof the second fin recess FR2 may be at a lower level than the lower endof the first fin recess FR1. However, the inventive concept is notlimited thereto, and the lower end of the second fin recess FR2 may beat a level lower than or corresponding to the lower end of the first finrecess FR1.

The lower diffusion break region DB1 may be inside the second fin recessFR2 in the second region N. The lower diffusion break region DB1 mayfill the second fin recess FR2. The lower diffusion break region DB1 maybe in contact with the second active fin F2 and the second active regionAR2, which are exposed by the second fin recess FR2. The lower diffusionbreak region DB1 may be in contact with the device isolation layer STIand DTI. The inner spacers 162 of the dummy spacers 161 and 162 may bedisposed on the lower diffusion break region DB1. Further, theinterlayer insulating layer 130 disposed between the inner spacers 162may be disposed on the lower diffusion break region DB1. In someembodiments, a top surface of the lower diffusion break region DB1 maybe at the same level as the upper ends of the active fins F1 and F2.However, the inventive concept is not limited thereto, and the topsurface of the lower diffusion break region DB1 may be at a lower orupper level than the upper ends of the active fins F1 and F2. In someembodiments, the lower diffusion break region DB1 may include a tensilestress material. The tensile stress material may be a material capableof applying tensile stress to an NMOS region. For example, the lowerdiffusion break region DB1 may include oxide such as tetraethylorthosilicate (TEOS).

Second gate trenches GT2 may be disposed in the second region N. Thesecond gate trenches GT2 and the first gate trenches GT1 may be disposedin a straight line in the second direction. In some embodiments, one ofthe second gate trenches GT2 and one of the first gate trenches GT1 maybe aligned along the second direction. In some embodiments, a pluralityof second gate trenches GT2 may be spaced apart from each other in thefirst direction. For example, two second gate trenches GT2 may be spacedapart from each other in the first direction. The second gate trench GT2may extend on the second active fin F2, the lower diffusion break regionDB1, and the device isolation layer STI and DTI along the dummy spacers161 and 162 in the second direction. Sidewalls of the second gate trenchGT2 may be defined by portions of the dummy spacers 161 and 162, whichare disposed in the second region N. A bottom surface of the second gatetrench GT2 may be defined by the second active fin F2 and the lowerdiffusion break region DB1. Further, the bottom surface of the secondgate trench GT2 may be defined by the device isolation layer STI andDTI. In some embodiments, the bottom surface of the second gate trenchGT2 may have a shape protruding upward due to the lower diffusion breakregion DB1. In some embodiments, the bottom surface of the second gatetrench GT2 may be at a different level than the bottom surface of thefirst gate trench GT1. For example, the bottom surface of the secondgate trench GT2 may be at a higher level than the bottom surface of thefirst gate trench GT1. The second gate trench GT2 and the first gatetrench GT1, which are placed in a straight line in the second direction,may be integrally formed with each other to form an integral trenchspace. In some embodiments, the second gate trench GT2 may be connectedto the first gate trench GT1, and the second gate trench GT2 and thefirst gate trench GT1 may form a single trench space as illustrated inFIG. 2B. A step difference may be formed at a portion of the second gatetrench GT2, which is connected to the first gate trench GT1.

The upper diffusion break region DB2 may be disposed inside the secondgate trenches GT2 in the second region N. The upper diffusion breakregion DB2 may fill the second gate trench GT2. The upper diffusionbreak region DB2 may elongate in the second direction and disposed alongwith the single diffusion break region SDB in a straight line in thesecond direction. In some embodiments, the upper diffusion break regionDB2 and the single diffusion break region SDB are aligned along thesecond direction as illustrated in FIG. 1. Side surfaces of the upperdiffusion break region DB2 may be in contact with the dummy spacers 161and 162. A bottom surface of the upper diffusion break region DB2 may bein contact with the second active fin F2, the lower diffusion breakregion DB1, and the device isolation layer STI and DTI. In someembodiments, the upper diffusion break region DB2 may cover a portion ofan upper portion of the lower diffusion break region DB1. The upperdiffusion break region DB2 may extend upward from the inside of thesecond gate trench GT2 so that an upper portion of the upper diffusionbreak region DB2 may be interposed between the mask layers 140. Forexample, a top surface of the upper diffusion break region DB2 may be atthe same level as a top surface of the mask layer 140.

In some embodiments, one side surface of the upper diffusion breakregion DB2 may be in contact with another side surface of the singlediffusion break region SDB. Since the single diffusion break region SDBis in contact with the upper diffusion break region DB2, voids may notbe formed between the single diffusion break region SDB and the upperdiffusion break region DB2. In some embodiments, a side surface of theupper diffusion break region DB2 may contact a side surface of thesingle diffusion break region SDB, as illustrated in FIG. 2B. In someembodiments, the upper diffusion break region DB2 may include a tensilestress material. The tensile stress material may be a material capableof applying tensile stress to an NMOS region. For example, the lowerdiffusion break region DB1 may include an oxide formed using an atomiclayer deposition (ALD) process. The lower diffusion break region DB1 mayinclude the same material as the upper diffusion break region DB2.

FIG. 2C shows vertical cross-sectional views taken along the lines I-I′and II-IF of FIG. 1, according to some embodiments. Hereinafter, thesame descriptions as in FIGS. 1 to 2B may be omitted for brevity.

Referring to FIG. 2C, an upper diffusion break region DB2 may extenddownward so that a bottom end of the upper diffusion break region DB2may be at a lower level than a top surface of a lower diffusion breakregion DB1. A lower portion of the upper diffusion break region DB2 ofFIG. 2C may extend to a lower level than a top end of a second activefin F2 so that a contact area between the upper diffusion break regionDB2 and the lower diffusion break region DB1 may increase.

FIG. 3 schematically illustrates a layout of a partial region of asemiconductor device according to some embodiments of the inventiveconcept. FIG. 4A shows vertical cross-sectional views taken along linesVI-VI′ and VII-VII′ of FIG. 3 according to some embodiments of theinventive concept. FIG. 4B shows vertical cross-sectional views takenalong lines VIII-VIII′, IX-IX′, and X-X′ of FIG. 3 according to someembodiments of the inventive concept. FIGS. 4C and 4D show verticalcross-sectional views taken along lines VI-VI′ and VII-VII′ of FIG. 3according to some embodiment of the inventive concept. Hereinafter, thesame descriptions as in FIGS. 1 to 2C may be omitted for brevity.

Referring to FIGS. 3 to 4B, a semiconductor device 200 may include afirst fin recess FR1, dummy spacers 163, 164, 165, and 166, a first gatetrench GT1, and a double diffusion break region DDB that may have alarge width in a first direction in a first region P.

The first fin recess FR1 may be disposed between a first gate structureG1 and a second gate structure G2. Sidewalls of the first fin recessesFR1 may be in contact with short sides of first active fins F1. Thesidewalls of the first fin recess FR1 may be defined by the first activefin F1. In some embodiments, the sidewalls of the first fin recess FR1may be defined by a first active region AR1 and the first active fin F1.In some embodiments, a width of a bottom surface of the first fin recessFR1 may be at least twice of a distance between outer sidewalls of gatespacers 114. For example, the first fin recess FR1 may be formed byextending the plurality of first fin recesses FR1 shown in FIG. 2A inthe first direction and integrating (e.g., merging) the plurality offirst fin recesses FR1 with each other. Each of the first gate structureG1 and the second gate structure G2 may have a first width W1 in thefirst direction, two dummy spacers 163 and 165 may be spaced apart fromeach other by a first distance DI in the first direction, and the bottomsurface of the first fin recess FR1 may have a second width W2 in thefirst direction. In some embodiments, each of the first distance DI andthe second width W2 may be at least twice of the first width W1, asillustrated in FIG. 4A.

The dummy spacers 163, 164, 165, and 166 may include outer spacers 163and 165 and inner spacers 164 and 166. The outer spacers 163 and 165 mayelongate over the first region P and the second region N in a seconddirection. The inner spacers 164 and 166 may elongate only in the secondregion N in the second direction. The inner spacers 164 and 166 may notbe disposed in the first region P. The dummy spacers 163 and 165disposed in the first region P may include a pair of outer spacers. Thedummy spacers 163, 164, 165, and 166 disposed in the second region N mayinclude a pair of outer spacers 163 and 165 and a pair of inner spacers164 and 166. The outer spacers 163 and 165 disposed in the first regionP may be disposed in the first active fin F1 and the device isolationlayer STI and DTI. In some embodiments, the first distance DI betweenthe outer spacers 163 and 165 disposed in the first region P (e.g., adistance between sides of the outer spacers 163 and 165 in the firstregion P, which face each other, as illustrated in FIG. 4A) in the firstdirection may be greater than or equal to the second width W2 of thebottom surface of the first fin recess FR1 in the first direction. Forexample, the first distance DI between inner side surfaces of the outerspacers 163 and 165 may be at least twice of a distance between theouter sidewalls of the gate spacers 114 (e.g., the first width W1 ofeach of the first gate structure G1 and the second gate structure G2).

Sidewalls of the first gate trench GT1 may be defined by portions of theouter spacers 163 and 165, which are disposed in the first region P. Thefirst gate trench GT1 may be in contact with other ends of the innerspacers 164 and 166 disposed in the second region N and another sidesurface of the interlayer insulating layer 130 disposed between theinner spacers 164 and 166. A bottom surface of the first gate trench GT1may be defined by the device isolation layer STI and DTI. The first gatetrench GT1 may extend on the device isolation layer STI and DTI alongthe dummy spacers 163 and 165 in the second direction. For example, thefirst gate trench GT1 may be formed by extending the plurality of firstgate trenches GT1 shown in FIG. 2A in the first direction andintegrating the plurality of first gate trenches GT1 with each other.The first gate trench GT1 may be integrally formed with the first finrecess FR1 to form an integral space. The first fin recess FR1 may beformed by extending a portion of the first gate trench GT1 downward. Insome embodiments, the first gate trench GT1 may be connected to thefirst fin recess FR1, and the first gate trench GT1 and the first finrecess FR1 may form a single space as illustrated in FIG. 4A.

The double diffusion break region DDB may be disposed inside the firstfin recess FR1 and the first gate trench GT1. The double diffusion breakregion DDB may fill the first fin recess FR1 and the first gate trenchGT1. In some embodiments, one side surface of the double diffusion breakregion DDB may be in contact with another side surface of an upperdiffusion break region DB2 disposed in the second region N. In someembodiments, although not shown, one side surface of the doublediffusion break region DDB may be in contact with another side surfaceof a lower diffusion break region DB1 disposed in the second region N.As used herein, the double diffusion break region DDB may be called as a“multiple diffusion break region.”

Referring to FIG. 4C, an upper diffusion break region DB2 may extenddownward so that a bottom end of the upper diffusion break region DB2may be at a lower level than a top surface of a lower diffusion breakregion DB1. A lower portion of the upper diffusion break regions DB2 ofFIG. 4C may extend to a lower level than a top end of a second activefin F2 so that a contact area between the upper diffusion break regionDB2 and the lower diffusion break region DB1 may increase, as shown inFIG. 2C.

Referring to FIG. 4D, in some embodiments, the double diffusion breakregion DDB may include a first double diffusion break region DDB1, asecond double diffusion break region DDB2, and a third double diffusionbreak region DDB3. The first double diffusion break region DDB1 and thesecond double diffusion break region DDB2 may be disposed between dummyspacers 161 and 162 and extend between first active fins F1. The thirddouble diffusion break region DDB3 may be disposed between the firstdouble diffusion break region DDB1 and the second double diffusion breakregion DDB2. In some embodiments, a bottom surface of the third doublediffusion break region DDB3 may be at a higher level than a top end of afirst active fin F1. In some embodiments, the bottom surface of thethird double diffusion break region DDB3 may be at a lower level thanthe top end of the first active fin F1.

FIGS. 5A to 10B are vertical cross-sectional views illustrating a methodof manufacturing a semiconductor device according to some embodiments ofthe inventive concept. FIGS. 5A, 6A, 7A, 8A, 9A, and 10A show verticalcross-sectional views taken along the lines I-I′ and II-IF of FIG. 1according to some embodiments of the inventive concept. FIGS. 5B, 6B,7B, 8B, 9B, and 10B show vertical cross-sectional views taken along theline of FIG. 1 according to some embodiments of the inventive concept.Hereinafter, the same descriptions as in FIGS. 1 to 4B may be omittedfor brevity.

FIGS. 5A and 5B illustrate semiconductor devices on which processes froma process of forming active fins F1 and F2 on a substrate 101 to a gatereplacement process are completed. For example, active regions AR1 andAR2 and active fins F1 and F2 may be formed on a substrate 101 includinga first region P and a second region N, and a device isolation layer ST1and DT1 may be formed to surround the vicinities of the active regionsAR1 and AR2 and the active fins F1 and F2. The active region AR2, theactive fins F2, and the device isolation layer STI and DT1 may bepartially etched in the second region of the substrate 101, therebyforming a second fin recess region FR2. The second fin recess region FR2may be filled by a lower diffusion break region DB1. A dummy gatestructure (not shown), source and drain regions 120, and an interlayerinsulating layer 130 may be formed on the active fins F1 and F2, thedevice isolation layer STI and DTI and the lower diffusion break regionDB1. A gate replacement process may be performed to replace the dummygate structure.

Referring to FIGS. 5A and 5B, the semiconductor device on which the gatereplacement process has been performed may include a first region P anda second region N. For instance, the first region P may be a PMOSregion, and the second region N may be an NMOS region. The semiconductordevice may include active regions AR1 and AR2, active fins F1 and F2,gate structures G1, G2, G3, and G4, sacrificial gate structures SG1 andSG2, source and drain regions 120, a shallow device isolation layer STI,a deep device isolation layer DTI, and an interlayer insulating layer130 on the substrate 101 in the first region P and the second region N.The semiconductor device may further include the lower diffusion breakregion DB1 in the second region N.

The sacrificial gate structures SG1 and SG2 may be disposed between thefirst gate structure G1 and the second gate structure G2. A mask layer140 may be formed on the gate structures G1, G2, G3, and G4, thesacrificial gate structures SG1 and SG2, and the interlayer insulatinglayer 130. The mask layer 140 may include an open region OP in the firstregion P. Although not shown, a photoresist film may be formed on themask layer 140 in the first region P. For example, the photoresist filmmay be formed to be aligned with sidewalls of spacers of the sacrificialgate structures SG1 and SG2. The open region OP of the mask layer 140may be formed by etching a portion of the mask layer 140 using thephotoresist film as an etch mask. Top surfaces of the sacrificial gatestructures SG1 and SG2 may be exposed by the open region OP of the masklayer 140. After the open region OP is formed, the photoresist film maybe removed.

Referring to FIGS. 6A and 6B, a gate capping layer 115, a gate electrode111 and 112, and a gate insulating layer 113 of the sacrificial gatestructures SG1 and SG2 may be sequentially etched and removed throughthe open region OP. The gate capping layer 115, the gate electrode 111and 112, and the gate insulating layer 113 may be removed to form afirst gate trench GT1. Sidewalls of dummy spacers 161 and 162 and upperportions of the fin active fins F1 may be exposed by the first gatetrench GT1. Further, a top surface of the device isolation layer STI andDTI may be exposed by the first gate trench GT1. For example, the gatecapping layer 115, the gate electrode 111 and 112, and the gateinsulating layer 113 may be removed using an anisotropic etching processand/or an isotropic etching process. The etching processes may beperformed using etching materials having high selectivities with respectto the gate capping layer 115, the gate electrode 111 and 112, and thegate insulating layer 113.

Referring to FIGS. 7A and 7B, the first active fins F1 of which theupper portions are exposed by the first gate trench GT1 may be etched inthe first region P to form a first fin recess FR1. That is, the firstfin recess FR1 may be formed by extending a portion of the first gatetrench GT1 downward. A bottom end of the first fin recess FR1 may be ata different level than a bottom end of the lower diffusion break regionDB1. For example, the bottom end of the first fin recess FR1 may be at alower level or a high level than the bottom end of the lower diffusionbreak region DB1. However, the inventive concept is not limited thereto,and the bottom end of the first fin recess FR1 may be at the same levelas the bottom end of the lower diffusion break region DB1. The first finrecess FR1 may be integrally formed with the first gate trench GT1 toform an integrally connected space. In some embodiments, the first finrecess FR1 may be connected to the first gate trench GT1, and the firstfin recess FR1 and the first gate trench GT1 may form a single space asillustrated in FIGS. 7A and 7B. During the formation of the first finrecess FR1, the device isolation layer STI and DTI disposed in the firstregion P may be partially etched so that a height of the top surface ofthe device isolation layer ST1 and DT1 may be reduced. The top surfaceof the device isolation layer STI and DTI in the first region P may beat a lower level than the top surface of the device isolation layer STIand DTI in the second region N.

Referring to FIGS. 8A and 8B, a single diffusion break region SDB may beformed inside the first fin recess FR1 and the first gate trench GT1 inthe first region P. The single diffusion break region SDB may fill(e.g., completely fill) the first fin recess FR1 and the first gatetrench GT1. Further, the single diffusion break region SDB may fill theopen region OP of the mask layer 140. One side surface of the singlediffusion break region SDB may be in contact with other side surfaces ofthe sacrificial gate structures SG1 and SG2 in the second region N.

Referring to FIGS. 9A and 9B, the gate insulating layer 113, the gateelectrode 111 and 112, and the gate capping layer 115 of the sacrificialgate structures SG1 and SG2 may be removed in the second region N.Although not shown, a photoresist film may be formed on the mask layer140. The photoresist film may be formed to be aligned with the sidewallsof the spacers of the sacrificial gate structures SG1 and SG2 in thesecond region N. A portion of the mask layer 140 may be etched using thephotoresist film as an etch mask in the second region N to form an openregion OP. The top surfaces of the sacrificial gate structures SG1 andSG2 may be exposed by the open region OP. After the open region OP isformed, the photoresist film may be removed.

The gate capping layer 115, the gate electrode 111 and 112, and the gateinsulating layer 113 of the sacrificial gate structures SG1 and SG2 maybe sequentially removed through the open region OP in the second regionN. The gate capping layer 115, the gate electrode 111 and 112, and thegate insulating layer 113 may be removed to form a second gate trenchGT2. The second gate trench GT2 may expose sidewalls of the dummyspacers 161 and 162, an upper portion of the lower diffusion breakregion DB1, the top surface of the device isolation layer STI and DTI,and the side surfaces of the single diffusion break region SDB. The topsurface of the device isolation layer ST1 and DTI exposed by the secondgate trench GT2 may be at a higher level than or at the same level asthe top surface of the device isolation layer STI and DTI in the firstregion P.

Referring to FIGS. 10A and 10B, an upper diffusion break region DB2 maybe formed in the second region N. The upper diffusion break region DB2may fill (e.g., completely fill) the second gate trench GT2. The upperdiffusion break region DB2 may fill the open region OP of the mask layer140. The upper diffusion break region DB2 may cover a top surface of themask layer 140. The upper diffusion break region DB2 may cover an upperportion of the lower diffusion break region DB1. The upper diffusionbreak region DB2 may be in contact with the top surface of the deviceisolation layer STI and DTI. The upper diffusion break region DB2 maycover the single diffusion break region SDB. The upper diffusion breakregion DB2 may be in contact with one side surface of the singlediffusion break region SDB. In some embodiments, the upper diffusionbreak region DB2 may be formed using an atomic layer deposition (ALD)process. After the upper diffusion break region DB2 is formed to fillthe open region OP of the mask layer 140, the upper diffusion breakregion DB2 may be removed from the mask layer 140, and the top surfaceof the mask layer 140 may be exposed by, for example, a planarizationprocess. Subsequently, an oxide layer may be formed to cover the exposedtop surface of the mask layer 140.

FIGS. 11 through 15 show vertical cross-sectional views illustrating amethod of manufacturing a semiconductor device according to someembodiments of the inventive concept. Specifically, FIGS. 11 through 15show vertical cross-sectional views taken along the lines VI-VI′ andVII-VII′ of FIG. 3 according to some embodiments of the inventiveconcept. FIG. 11 illustrates a semiconductor device on which processesfrom a process of forming active fins F1 and F2 on a substrate 101 to agate replacement process are completed.

Referring to FIG. 11, the semiconductor device may include a firstregion P and a second region N. The semiconductor device may includeactive fins F1 and F2, gate structures, sacrificial gate structures SG1and SG2, source and drain regions 120, and an interlayer insulatinglayer 130 on a substrate 101. The semiconductor device may furtherinclude a lower diffusion break region DB1 in the second region N.

A mask layer 140 may be formed on the gate structures G1 and G2, thesacrificial gate structures SG1 and SG2, and the interlayer insulatinglayer 130. Although not shown, a photoresist film may be formed on themask layer 140 and aligned with one sidewall of a first sacrificial gatestructure SG1 and another sidewall of a second sacrificial gatestructure SG2. Portions of the mask layer 140 may be etched using thephotoresist film as an etch mask, thereby forming open regions OP. Topsurfaces of the sacrificial gate structures SG1 and SG2 and a topsurface of the interlayer insulating layer 130 disposed between thesacrificial gate structures SG1 and SG2 may be exposed by the openregions OP.

A gate capping layer 115, a gate electrode 111 and 112, and a gateinsulating layer 113 of the sacrificial gate structures SG1 and SG2 maybe removed through the open regions OP to form first gate trenches GT1.Upper portions of the first active fins F1 and sidewalls of spacers 163,164, 165, 166 may be exposed by the first gate trenches GT1.

Referring to FIG. 12, the first active fins F1, the interlayerinsulating layer 130, the spacers, and the source and drain regions 120may be etched through the open regions OP and the first gate trench GT1,thereby forming a first gate trench GT1 having a large width and a firstfin recess FR1 having a large width. The first gate trench GT1 havingthe large width may be integrally formed with the first fin recess FR1having the large width to form an integral space. In some embodiments,the first gate trench GT1 may be connected to the first fin recess FR1,and the first gate trench GT1 and the first fin recess FR1 may form asingle space as illustrated in FIG. 12. The first active fins F1, thefirst gate trench GT1 having the large width, and the first fin recessFR1 having the large width may form one trench.

Referring to FIG. 13, a double diffusion break region DDB may be formedto fill (e.g., completely fill) the first fin recess FR1 having thelarge width and the first gate trench GT1 having the large width. Thedouble diffusion break region DDB may further fill the open regions OP.The double diffusion break region DDB may be formed to cover the masklayer 140.

Referring to FIG. 14, a top surface of the mask layer 140 may be exposedusing, for example, a planarization process. Although not shown, aphotoresist film may be formed on the exposed top surface of the masklayer 140. For example, the photoresist film may be formed to be alignedwith sidewalls of spacers of the sacrificial gate structures SG1 and SG2in the second region N. In the second region N, the open regions OP ofthe mask layer 140 may be formed by etching the portions of the masklayer 140 using the photoresist film as an etch mask. In the secondregion N, top surfaces of the sacrificial gate structure SG1 and SG2 maybe exposed by the open regions OP of the mask layer 140. After the openregions OP are formed, the photoresist film may be removed.

In the second region N, the gate capping layer 115, the gate electrode111 and 112, and the gate insulating layer 113 of the sacrificial gatestructures SG1 and SG2 may be sequentially removed through the openregions OP. The gate capping layer 115, the gate electrode 111 and 112,and the gate insulating layer 113 may be removed to form a second gatetrench GT2. The second gate trench GT2 may expose the sidewalls of thespacers, an upper portion of the lower diffusion break region DB1, a topsurface of a device isolation layer STI and DTI, and side surfaces ofthe double diffusion break region DDB. The top surface of the deviceisolation layer ST1 and DTI, which is exposed by the second gate trenchGT2, may be at a higher level than, or the same level as, the topsurface of the device isolation layer STI and DTI in the first region P.

Referring to FIG. 15, an upper diffusion break region DB2 may be formedto fill (e.g., completely fill) the second gate trench GT2. The upperdiffusion break region DB2 may be in contact with the lower diffusionbreak region DB1. In some embodiments, the upper diffusion break regionDB2 may be formed using an ALD process.

According to example embodiments of the inventive concept, asemiconductor device can include diffusing break regions includingdifferent materials in a PMOS region and an NMOS region. Insemiconductor devices according to some embodiments of the inventiveconcept, voltage characteristics of the PMOS region can be improved, andadditional tensile stress can be applied to the NMOS region to increaseor possibly optimize stress.

While the embodiments of the inventive concept have been described withreference to the accompanying drawings, it should be understood by thoseskilled in the art that various modifications may be made withoutdeparting from the scope of the inventive concept and without changingessential features thereof. Therefore, the above-described embodimentsshould be considered illustrative, and not restrictive, and the appendedclaims are intended to cover all such modifications, enhancements, andother embodiments, which fall within the true spirit and scope of theinventive concept. Thus, to the maximum extent allowed by law, the scopeis to be determined by the broadest permissible interpretation of thefollowing claims and their equivalents, and shall not be restricted orlimited by the foregoing detailed description.

What is claimed is:
 1. A semiconductor device comprising: a substratecomprising a first region and a second region; a plurality of firstactive fins extending in a first direction on the first region; aplurality of second active fins extending parallel to the plurality offirst active fins on the second region; a plurality of single diffusionbreak regions between two first active fins of the plurality of firstactive fins, the plurality of single diffusion break regions beingspaced apart from each other in the first direction; a lower diffusionbreak region between two second active fins of the plurality of secondactive fins and extending in a second direction that is different fromthe first direction; and a plurality of upper diffusion break regions onthe lower diffusion break region, the plurality of upper diffusion breakregions being spaced apart from each other in the first direction, andeach of the plurality of upper diffusion break regions overlapping thelower diffusion break region.
 2. The semiconductor device of claim 1,wherein the plurality of upper diffusion break regions are in contactwith the lower diffusion break region.
 3. The semiconductor device ofclaim 1, wherein side surfaces of the plurality of single diffusionbreak regions are in contact with side surfaces of the plurality ofupper diffusion break regions, respectively.
 4. The semiconductor deviceof claim 3, wherein each of the plurality of single diffusion breakregions is aligned with a respective one of the plurality of upperdiffusion break regions along the second direction.
 5. The semiconductordevice of claim 1, wherein bottom ends of the plurality of upperdiffusion break regions are at a lower level than a top end of the lowerdiffusion break region.
 6. The semiconductor device of claim 1, whereinthe plurality of single diffusion break regions comprise a compressivestress material, and the lower diffusion break region and the pluralityof upper diffusion break regions comprise a tensile stress material. 7.The semiconductor device of claim 1, wherein each of the plurality ofsingle diffusion break regions comprises a portion in the first regionof the substrate and a portion protruding upwardly beyond a top surfaceof the first region of the substrate.
 8. A semiconductor devicecomprising: a substrate comprising a first region and a second region; aplurality of first active fins extending in a first direction on thefirst region, two first active fins of the plurality of first activefins defining a first fin recess in the first region of the substrate; aplurality of second active fins extending parallel to the plurality offirst active fins on the second region of the substrate; a first gatestructure and a second gate structure, each of the first and second gatestructures traversing one of the plurality of first active fins and oneof the plurality of second active fins and having a first width in thefirst direction; first and second outer spacers between the first andsecond gate structures, the first and second outer spacers being spacedapart from each other by a first distance in the first direction, thefirst distance being at least twice the first width, the first andsecond outer spacers defining a first gate trench therebetween, and thefirst gate trench being connected to the first fin recess; a doublediffusion break region in the first fin recess and the first gatetrench; a lower diffusion break region in the second region of thesubstrate between two second active fins of the plurality of secondactive fins; first and second inside spacers on the lower diffusionbreak region between the first and second outer spacers, the first outerspacer, the first inner spacer, the second inner spacer, and the secondouter spacer being sequentially arranged along the first direction, andtwo second gate trenches being defined by a pair of the first outerspacer and the first inner spacer and a pair of the second inner spacerand the second outer spacer; and two upper diffusion break regions inthe two second gate trenches, respectively.
 9. The semiconductor deviceof claim 8, wherein ends of the first and second inside spacers are incontact with a side surface of the double diffusion break region. 10.The semiconductor device of claim 8, wherein a portion of a side surfaceof the double diffusion break region is in contact with side surfaces ofthe two upper diffusion break regions.
 11. A semiconductor devicecomprising: a substrate comprising a P-type metal-oxide-semiconductor(PMOS) region and an N-type MOS (NMOS) region; a plurality of firstactive fins extending in a first direction on the PMOS region; aplurality of second active fins extending parallel to the plurality offirst active fins on the NMOS region; a first gate structure and asecond gate structure extending in a second direction and being spacedapart from each other in the first direction, each of the first andsecond gate structures traversing one of the plurality of first activefins and one of the plurality of second active fins; a lower diffusionbreak region in the NMOS region of the substrate between two secondactive fins of plurality of the second active fins and between the firstgate structure and the second gate structure; and an upper diffusionbreak region on the lower diffusion break region.
 12. The semiconductordevice of claim 11, wherein at least a portion of a bottom surface ofthe upper diffusion break region is in contact with a top surface of thelower diffusion break region.
 13. The semiconductor device of claim 11,wherein the upper diffusion break region overlaps the lower diffusionbreak region.
 14. The semiconductor device of claim 11, wherein theupper diffusion break region extends downward below a top surface of thelower diffusion break region.
 15. The semiconductor device of claim 11,further comprising a multiple diffusion break region between the firstgate structure and the second gate structure on the PMOS region, whereina side surface of the multiple diffusion break region is in contact witha side surface of the upper diffusion break region.
 16. Thesemiconductor device of claim 15, wherein the multiple diffusion breakregion comprises a compressive stress material, and the lower diffusionbreak region and the upper diffusion break region comprise a tensilestress material.
 17. The semiconductor device of claim 15, furthercomprising a device isolation layer defining the plurality of firstactive fins and the plurality of second active fins, wherein themultiple diffusion break region extends on the device isolation layer inthe second direction, and a portion of the multiple diffusion breakregion extends between two first active fins of the plurality of firstactive fins.
 18. The semiconductor device of claim 15, wherein themultiple diffusion break region comprises a plurality of multiplediffusion break regions that are spaced apart from each other in thefirst direction, and the upper diffusion break region comprises aplurality of upper diffusion break regions that are spaced apart fromeach other in the first direction, and wherein each of the plurality ofmultiple diffusion break regions is aligned with a respective one of theplurality of upper diffusion break regions in the second direction. 19.The semiconductor device of claim 15, wherein the multiple diffusionbreak region comprises a portion in the PMOS region of the substrate anda portion protruding upwardly beyond a top surface of the PMOS region ofthe substrate.
 20. The semiconductor device of claim 15, wherein themultiple diffusion break region has a width in the first direction atleast twice a width of the first gate structure in the first direction.